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(鞕检�诫秬韯�) 霃欔淡雽� 鞝勳瀽鞝勱赴瓿淀暀攵� 旯�歆�順�, 旯�雼ろ槣 靹濎偓, 旯�靹膘�� 甑愳垬. Fraunhofer IKTS 靻岇啀 Microelectronic Materials and Nanoanalysis鞚� André Clausner 氚曥偓.
 

CMOS 旮办垹瓿� 順疙櫂 臧�電ロ暅 HfAlOx 旮半皹 臧曥湢鞝勳劚 韯半剱 鞝戫暕 靻岇瀽 鞝滌瀾
霙办柎雮� 牍勴湗氚滌劚 氅旊��毽� 韸轨劚鞚� 頇曤炒頃橃棳 鞚戈车歆�電� 鞚戩毄 甑�順勳棎 靹标车
雮橂吀鞐�頃欔臣 旮瓣硠鞝� 鞁犽�办劚鞚� 鞐瓣惮頃橂姅 霃呾澕鞚� Fraunhofer IKTS 鞐瓣惮韺�瓿� 旮措皜頌� 順戨牓
雮橂吀 攵勳暭 鞝�氇� 甑�鞝� 頃欖垹歆� ‘Advanced Intelligent Systems’ 鞓�霛检澑 瓴岇灛 氚� 旎る矂 靹犾爼

 

霃欔淡雽赌顷欔祼 鞝勳瀽鞝勱赴瓿淀暀攵� 旯�歆�順�, 旯�雼ろ槣 靹濎偓 (瓿惦彊 鞝�1鞝�鞛�), 旯�靹膘�� 甑愳垬 (甑愳嫚鞝�鞛�)搿� 甑�靹彪悳 鞐瓣惮韺�鞚� 臧曥湢鞝勳劚 HfAlOx 氚曤�� 旮半皹 彀�靹鸽寑 氅旊��毽� 靻岇瀽毳� 臧滊皽頄堧嫟瓿� 氚滍憸頄堧嫟.

旮办〈 Perovskite 旮半皹 臧曥湢鞝勳劚 韯半剱 鞝戫暕 靻岇瀽電� 鞎堨爠靹� 氚� 雮搓惮靹� 氍胳牅, 瓿奠爼 氤奠灐靹标臣 CMOS 順疙櫂鞚� 攵堦皜電ロ晿雼る姅 頃滉硠毳� 臧�歆�瓿� 鞛堧嫟. 氤� 鞐瓣惮鞐愳劀 臧滊皽頃� 臧曥湢鞝勳劚 氚曤�夓潃 霙办柎雮� 鞁犽�办劚瓿� CMOS 順疙櫂靹�, 雮�鞚� 靻岆箘 鞝勲牓瓿� 瓿犽皜霃� 鞝�鞛レ潣 鞛レ爯鞚� 臧�歆�瓿� 鞛堧嫟. 氤� 鞐瓣惮鞐愳劀 鞝滌瀾頃� HfAlOx電� ALD 旮办垹鞚� 韱淀暣 鞝曧檿頃� 霊愱粯 臁办爤瓿� Al 霃勴晳 雴嶋弰鞚� 斓滌爜頇旊ゼ 雼�靹表枅瓿�, 氅旊��毽� 韸轨劚 氚� 鞁滊儏鞀� 靻岇瀽 韸轨劚鞚� 臧滌劆頄堧嫟.

旯�靹膘�� 甑愳垬電� “瓿惦彊 1鞝�鞛� 頃欖儩鞚� 歆侅爲 靹滌毟雽赌顷欔祼 氚橂弰觳搓车霃欖棸甑�靻岇檧 霃欔淡雽赌顷欔祼 MINT 觳�鞝曥嫟 鞛ル箘毳� 頇滌毄頃橃棳 靻岇瀽 鞝滌瀾鞚� 歆勴枆頃橃榾瓿�, 雼るジ 瓿惦彊 1鞝�鞛� 頃欖儩鞚� 霃呾澕 Fraunhofer IKTS 鞐瓣惮韺�鞐� 韺岅铂霅橃柎 旮措皜頌� 順戨牓頄堧嫟. 鞖办垬頃� 鞝�鞛� 鞖╇焿瓿� 雴掛潃 鞚戨嫷 靻嶋弰毳� 鞝滉车頃橃棳 雽�鞖╇焿 瓿犾啀 靻岇瀽臧� 鞖旉惮霅橂姅 攵勳暭鞐愳劀 頃奠嫭鞝侅澑 鞐�頃犾潉 頃� 瓴冹溂搿� 鞓堨儊頃滊嫟”氅� “雺措煱 順曧儨鞚� 鞝曤炒 觳橂Μ鞕� 旮办柕 旮半姤鞚� 須�瓿检爜鞙茧�� 氇�氚╉晿瓿� 甑�順勴晿電� 雿� 頇滌毄鞚� 臧�電ロ暊 靾� 鞛堨潉 瓴�”鞚措澕瓿� 旮半寑毳� 雮橅儉雰堧嫟.

氤� 鞐瓣惮電� 靷办梾韱奠儊鞛愳洂攵�臧� 欤缄磤頃橂姅 "觳�雼�靻岇灛旮半皹 鞀る�堩姼韺╉啝毽� 旮�搿滊矊鞚胳灛 鞏戩劚 靷�鞐�“ 瓿检牅鞚� 歆�鞗愳潉 氚涭晞, 雮橂吀鞐�頃欔臣 旮瓣硠鞝� 鞁犽�办劚 鞐瓣惮鞚� 鞝勲�戈皜霌る�� 甑�靹彪悳 霃呾澕鞚� Fraunhofer IKTS 鞐瓣惮韺�瓿� 順戨牓頃橃棳 歆勴枆霅愲嫟. 旯�靹膘�� 鞐瓣惮韺�鞚� 靻岇瀽鞚� 靹り硠鞕� 瓿奠爼 氚� 鞝勱赴鞝� 韸轨劚 攵勳劃鞚� 雼措嫻頄堦碃, Fraunhofer 鞐瓣惮韺�鞚� 氚曤�� 攵勳劃鞐� 齑堨爯鞚� 毵烄穭雼�.

HfAlOx 氚曤�夓潣 鞏措嫄毵� 鞓�霃�, Al 霃勴晳 雴嶋弰鞕� 氚曤�� 霊愱粯 霌� 瓿奠爼 臁瓣贝鞚� 斓滌爜頇旊ゼ 韱淀暣 氅旊��毽� 韸轨劚鞚� 臧滌劆頄堧嫟. 旯�靹膘�� 鞐瓣惮韺�鞚� 鞓�頃� 4鞗� Nanoscale, 5鞗� Advanced Intelligent Systems 霌� 鞝�氇呿暅 甑�鞝� 頃欖垹歆�鞐� HfOx旮半皹 臧曥湢鞝勳劚 靻岇瀽鞐� 甏�頃� 鞐瓣惮毳� 昃胳��頌� 瓴岇灛頃橁碃 鞛堧嫟. 順勳灛 IGZO 氚� MoS2 channel 旮半皹 FeFET鞚� 氅旊��毽�靻岇瀽 鞐瓣惮臧� 歆勴枆欷戩澊瓿� 鞁滊儏鞀� 韸轨劚 甑�順勳棎 靹标车頄堧嫟.

頃措嫻 鞐瓣惮瓴瓣臣電� <Effect of Al Concentration on Ferroelectric Properties in HfAlOx-Based Ferroelectric Tunnel Junction Devices for Neuro-inspired Applications>霛茧姅 鞝滊�╈溂搿� 雮橂吀 攵勳暭 鞝�氇� 甑�鞝� 頃欖垹歆� 銆孉dvanced Intelligent Systems (IF=7.298)銆� 23雲� 5鞗� 鞓�霛检澑鞐� 瓴岇灛霅愱碃 鞝�雱� 旎る矂鞐� 靹犾爼霅愲嫟.